Vacuum data

Units Pressure The legally-accepted unit of pressure measurement is the Pascal (1 N/m 2 ), as well as its multiples and decimals, but the common unit are the millibar (a multiple of the Pascal) and the torr. Pressure unit conversion table Pa Bar Kg/cmE2 Atmosph. g/cmE2 Torr* Mbar inch.Hg Psi 1Pa 1 10E-5 1.02×10 E-5 0.9869×10 E-5 1.02×10 E-2 0.75×10 E-2 10E-2 0.2953×10 E-3 0.1451×10 E-3 1bar 10E5 1 1.02 0.9869 1020 750 1,000 29.53 14.51 1kg/cmE2 0.980×10 E5 0.980 1 0.968 1,000 735 980 28.96 14.22 1Atmosph. 1.013×10 E5 1.013 1.033 1 1033 760 1013 29.95 14.70 1g/cmE2 98 0.098×10E2 10E-3 0.968×10 E-3 1 0.735 0.98 0.02896 0.1422 1Torr* 133.3 0.1333×10 E-2 1.36×10 E-3 0.001316 1.36 1 1.333 0.03937 0.01934 1mbar 100 0.001 1.02×10 E-3 0.9869×10 E-3 1.02 0.750 1 0.02953 0.01451 1inch.Hg 3386 3.386×10E-2 0.03453 0.03345 34.53 25.4 33.86 1 0.4910 1psi 6890 6.89×10E-2 0.0703 0.008 70.3 51.75 68.947 2.041 1 * 1 Torr = 1 mm Hg Pumping speed The legally-accepted unit of measurement is the m 3 /sec or its decimal, the dm 3 /sec (litre/sec). mE3 /s l/s mE3 /h l/mn CFM 1mE3 /s 1 10E3 3600 6×10E4 2.12×10E3 1l /s 10 -3 1 3.6 60 2.12 1mE3 /h 2.78×10E-4 0.278 1 16.7 5.89×10E-1 1l /mn 1.67×10E-5 0.167 0.06 1 3.53×10E-2 1CFM* 4.72×10E-4 0.471195 1.699 28.32 1 * American unit = cubic feet per minute Gaseous flow rate Pa.l/s Mbar.l/s Torr.l/s atm.cmE3 /s Sccm Lusec 1Pa.l/s 1 10 7.5 9.87 59.2 600 1mbar.l/s 0.1 1 0.75 0.987 5.92 760 1Torr.l/s 0.133 1.33 1 1.32 78.9 1,000 1atm.cmE3 /s 0.101 1.01 0.76 1 60 760 1sccm 1.69×10E-3 1.69×10E-2 1.27×10E-2 1.67×10E-2 1 12.7 Lusec 1.66×10E-3 1.66×10E-2 1.27×10E-2 1.66×10E-2 7.87×10E-2 1 Temperature K °C o F K 1 K-273.15 9/5×K-459.67 °C °C+273.15 1 9/5×°C+32 o F 5/9×( o F+459.67) 5/9×( o F-32) 1 °C -50 0 50 100 150 200 250 o F -58 32 122 212 302 392 482 Torque Nm Kp m Kgf cm Nm 1 0.102 10.2 Kp m 9.81 1 100 Kgf cm 0.098 0.01 1

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